Chotest Nano 3D Surface Profilometer SuperView W1 Series
Chotest Superview W1 a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters by MSP Metrology (M) from Chotest China
Features
SuperView W1
Nano 3D Optical Surface Profilometer
SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.
The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
Characteristics
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Item No.: W1
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Product name: SuperView W1 for Nano 3D Surface and Form
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Standard field of view: 0.49 x 0.49 mm
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Max field of view: 6 x 6mm
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Reflectivity of test object: 0.5 % ~ 100 %
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Repeatability of Roughness RMS: 0.005nm
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Scanning range: ≤10mm
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Resolution: 0.1nm
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Accuracy of stage measurement: 0.3 %
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Repeatability of stage measurement: 0.08% 1σ
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X, Y Object table:
Size: 320 x 200 mm
Moving range: 140 x 110 mm
Load capacity: 10kg
Control method: Motorized
Applications
It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.
Applications Cases
Measurement and analysis for various products, components and materials’ surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap, hole, stage, curvature, deformation, etc
3C Eletronics Sapphire Crystal
Semiconductor Package_Silicon Cut Sheet
3C Eletronics Ink Screen
Semiconductor Manufacturer – Wafer IC
Xtreme Vision 3D Measurement & Analysis Software
Integration software: measurement and analysis are operated in the same interface; With pre-configured analysis parameters, the software automatically statistics measurement data, and achieves rapid CNC measurement.
Specifications
| Model | SuperView W1 | ||
| Light source | Green LED | ||
| Video System | 1024 x 1024 | ||
| Optical Lens | 10X, 50X, (Optional 2.5X, 5X, 20X, 100X) | ||
| Optical Zoom | 1X (Optional 0.5X, 0.75X) | ||
| Lens Holder | 3 holes-manual | ||
| XY Object Table | Size | 200 x 200mm | |
| Moving Range | 100 x 100mm(Customization is supported) | ||
| Loading Capacity | 10kg | ||
| Control Method | Motorized | ||
| Tilt | ±4° Manual | ||
| Z-Axis Focusing | Moving Range | 100mm | |
| Control Method | Motorized | ||
| Scanning range of Z-Axis | 2.2mm (bigger range is optional) | ||
| Resolution of Z-Axis | 0.1nm | ||
| Max Scanning Speed | 30µm/s | ||
| Stage Measurement | Uncertainty | Repeatability | |
| 0.3% | 0.08% 1σ | ||
| Size | L590 x W600 x H790mm |
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| Weight | <120kg |
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Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
| Zoom Ratio of Lens | 2.5X | 5X | 10X | 20X | 50X | 100X | ||
| Numerical Hole Diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
| Optical Resolution @550nm (µm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||
| Depth of Focus (µm) | 48.6 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 | ||
| Working Distance (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | ||
| Field H x V (mm) | Video System 1024 x 1024 | 0.5X | 3.84 x 3.84 | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.192 x 0.192 | 0.096 x 0.096 |
| 0.75X | 2.56 x 2.56 | 1.28 x 1.28 | 0.64 x 0.64 | 0.32 x 0.32 | 0.128 x 0.128 | 0.064 x 0.064 | ||
| 1.0X | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.24 x 0.24 | 0.096 x 0.096 | 0.048 x 0.048 | ||
※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:
2D Parameters:
| Standard | Parameter | |||
| ISO 4287-1997 | Principal section | Roughness | Waviness | |
| Amplitude | Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku | Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku | Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku | |
| Interval | PSm,Pdq | RSm,Rdq | WSm,Wdq | |
| Substance | Pmr,Pdc | Rmr,Rdc,Rmr(Rz/4) | Wmr,Wdc,Wmr(Wz/4) | |
| Peak | PPc | RPc | WPc | |
| ISO 13565 | ISO 13565-2 | Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk | ||
| ISO 12085 | Roughness graph | R, AR, Rx, Nr | ||
| Waviness graph | W, AW, Wx, Wte | |||
| Other graph | Rke, Rpke, Rvke | |||
| AMSE B46.1 | 2D | Rt, Rp, Rv, Rz, Rpm, Rmax, Ra, Rq, Rsk, Rku, tp, Htp, Pc, Rda, Rdq, RSm, Wt | ||
| DIN EN ISO 4287-2010 | Original profile | Pa,Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu, PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra,Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, RPc, Rdq, Rdc, Rmr, | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc, Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
| JIS B0601-2013 | Original profile | Pa, Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu, PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra, Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, Rdq, Rdc, Rmr | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc, Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
| GBT 3505-2009 | Original profile | Pa, Pq, Pp, Pv, Pz, Pc, Pt, PSk, PKu ,PSm, PPc, Pdq, Pdc, Pmr, | ||
| Roughness | Ra, Rq, Rp, Rv, Rz, Rc, Rt, RSk, RKu, RSm, Rdq, Rdc, Rmr | |||
| Waviness | Wa, Wq, Wp, Wv, Wz, Wc,Wt, WSk, WKu, WSm, WPc, Wdq, Wdc, Wmr | |||
3D Parameters:
| Standard | Parameter | |
| ISO 25178 | Height | Sq, Ssk, Sku, Sp, Sv, Sz, Sa |
| Function | Smr, Smc, S×p | |
| Space | Sal, Str, Std | |
| Composite Parameter | Sdq, Sdr | |
| Peak | PPc | |
| Volume | Vm, Vv, Vmp, Vmc, Vvc, Vvv | |
| Form | Spd, Spc, S10z, S5p, S5v, Sda, Sha, Sdv, Shv | |
| Functional | Sk, Spk, Svk, Smr1, Smr2, Spq, Svq, Smq | |
| ISO 12781 | Flatness | FLTt, FLTp, FLTv, FLTq |
| EUR 15178N | Amplitude | Sa, Sq, Sz, Ssk, Sku, Sp, Sv, St |
| Space | Str, Std, Sal | |
| Composite Parameter | Sdq, Sds, Ssc, Sdr, Sfd | |
| Area, Volume | Smr, Sdc | |
| Function | Sk, Spk, Svk, Sr1, Sr2, Spq, Svq, Smq | |
| Functional | Sbi, Sci, Svi | |
| EUR 16145 EN | Amplitude | Sa, Sq, Sy, Sz, Ssk, Sku |
| Mixed Parameter | Ssc, Sdq, Sdr | |
| Functional | Sbi, Sci, Svi, Sk, Spk, Svk | |
| Space | Sds, Std, Stdi, Srw, Srwi | |
| Hardness | Hs, Hvol, Hv, Hps, Hpvol, Hpv, Hap, Hbp | |
| ASME B46.1 | 3D | St, Sp, Sv, Sq, Sa, Ssk, Sku, SWt |
Configurations
| SuperView W1 Host Machine | 1 pc | Standard |
| Interference Lens 10X | 1 pc | Standard |
| X, Y Object Table: Auto-moving Object Table | – | Standard |
| Video System: 1024*1024 pixels | – | Standard |
| Optical zoom: 0.5X | – | Standard |
| Calibration Module | 1 set | Standard |
| Joystick | 1 pc | Standard |
| Desktop Computer and Monitor | 1 set | Standard |
| XtremeVision Software |
1 set | Standard |
| Electrical Control Cabinet |
1 pc | Standard |
| Portable Inflating Pump |
1 set | Standard |
| Accessory Suitcase |
1 pc | Standard |
| User Manual |
1 set | Standard |
| Product Certificate and Warranty Card |
1 set | Standard |
| Interference Lens: 2.5X, 5X, 20X, 50X, 100X |
– | Optional |
| Video System: 2048*2048 pixels |
– | Optional |
| Optical zoom: 0.75X, 1X | – | Optional |
| Vacuum Object Table (dedicated for wafer IC) |
– | Optional |
